Antiadhesion Surface Treatments of Molds for High‐Resolution Unconventional Lithography

Abstract

A new strategy to achieve antiadhesion surface coatings is introduced. The approach, which uses molds coated in a thin film of poly(dimethylsiloxane) (PDMS, see figure) to achieve the antiadhesive surfaces, is applicable to virtually any type of mold material due to the use of silane chemistry and the low surface energy of PDMS. This allows simple and rapid replication of high complexity, high-aspect-ratio nanostructures with excellent replication fidelity.