Concepedia

High-aspect-ratio Coating

High-Aspect-Ratio Coating is a thin film deposition process in which conformal nanoscale layers are uniformly applied within deep, narrow features characterized by a significantly greater depth-to-width ratio, enabling precise surface engineering in high-aspect-ratio micro- and nanostructures.

61

Publications

2.9K

Citations

293

Authors

114

Institutions

Publications per year

2017–2026

14

Parents

Publications

61

A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches

Roy G. Gordon, Dennis M. Hausmann, E. Kim et al. · Chemical Vapor Deposition · 2003 · 390 citations · Full text

, , +17

Harnessing Localized Ridges for High‐Aspect‐Ratio Hierarchical Patterns with Dynamic Tunability and Multifunctionality

Changyong Cao, Hon Fai Chan, Jianfeng Zang et al. · Advanced Materials · 2013 · 194 citations

, , +17

Silver Nanowire Exposure Results in Internalization and Toxicity to Daphnia magna

Leona D. Scanlan, Robert B. Reed, Alexandre Loguinov et al. · ACS Nano · 2013 · 135 citations · Full text

, , +17

Injection molding of high aspect ratio sub-100 nm nanostructures

Maria Matschuk, Niels B. Larsen · Journal of Micromechanics and Microengineering · 2012 · 101 citations

, , +17

Atomic Layer Deposition of Lead Sulfide Quantum Dots on Nanowire Surfaces

Neil P. Dasgupta, Hee Joon Jung, Orlando Trejo et al. · Nano Letters · 2011 · 94 citations

, , +17

1–5 of 61

Authors

293

  1. NP
    Neil P. Dasgupta

    University of Michigan, United States

    2 publications · 126 citations

    2

    h-index

  2. RG
    Roy G. Gordon

    Harvard University, United States

    2 publications · 466 citations

    2

    h-index

  3. JV
    Joan Vila‐Comamala

    Paul Scherrer Institute, Switzerland

    2 publications · 82 citations

    2

    h-index

  4. VA
    Vitaliy A. Guzenko

    Paul Scherrer Institute, Switzerland

    2 publications · 82 citations

    2

    h-index

  5. MR
    Mikko Ritala

    University of Helsinki, Finland

    2 publications · 119 citations

    2

    h-index

1–5 of 293

Institutions

114

  1. Paul Scherrer Institute

    Villigen, Switzerland

    3 h-index

    9 publications

    353 citations

  2. Université Grenoble Alpes

    Saint-Martin-d'Hères, France

    2 h-index

    2 publications

    57 citations

  3. Lawrence Berkeley National Laboratory

    Berkeley, United States

    2 h-index

    8 publications

    336 citations

  4. Central South University

    Changsha, China

    2 h-index

    14 publications

    504 citations

  5. University of Helsinki

    Helsinki, Finland

    2 h-index

    8 publications

    490 citations

  6. University of California, Berkeley

    Berkeley, United States

    2 h-index

    11 publications

    1.4K citations

  7. Harvard University

    Cambridge, United States

    2 h-index

    9 publications

    1.3K citations

  8. Swiss Federal Laboratories for Materials Science and Technology

    Dübendorf, Switzerland

    2 h-index

    6 publications

    174 citations

1–8 of 114

Venues

  1. Microelectronic Engineering

    4 publications · 83 citations

    4

    h-index

  2. Thin Solid Films

    3 publications · 62 citations

    3

    h-index

  3. Chemistry of Materials

    3 publications · 80 citations

    3

    h-index

  4. Journal of Applied Physics

    3 publications · 103 citations

    3

    h-index

  5. Journal of Micromechanics and Microengineering

    JMM · 2 publications · 170 citations

    2

    h-index

1–5