Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry - Concepedia

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Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry

DOI Full Paper Access

16

Citations

26

References

1999

Year

A Strass, Peter Bieringer, W. Hänsch, V.M. Fuenzalida, A.L. Álvarez, José Alberto Luna, I. Mártil, F. L. Martı́nez, I. Eisele

Thin Solid Films

Materials ScienceEngineeringOxide ElectronicsApplied PhysicsSemiconductor Device FabricationDifferent StoichiometryThin Film Process TechnologyMolecular Beam EpitaxySilicon On Insulator

References

	Year	Citations

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