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Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry

A Strass, Peter Bieringer, W. Hänsch, V.M. Fuenzalida, A.L. Álvarez, José Alberto Luna, I. Mártil, F. L. Martı́nez, I. Eisele

Thin Solid Films · 1999 · 16 citations · 26 references

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26

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

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Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

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Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 799 citations

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XPS studies on SiOx thin films

R. Alfonsetti, L. Lozzi, M. Passacantando et al. · Applied Surface Science · 1993 · 340 citations

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Characteristics of Fast Surface States Associated with SiO[sub 2]-Si and Si[sub 3]N[sub 4]-SiO[sub 2]-Si Structures

B. E. Deal, E. L. MacKenna, P. L. Castro · Journal of The Electrochemical Society · 1969 · 149 citations

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