Concepedia

E. L. MacKenna

EL

2

Publications

170

Citations

2

H-Index

1969

Active since

Affiliations

Fairchild Semiconductor (United States)(Current)

E. L. MacKenna is an author at Fairchild Semiconductor (United States) specializing in engineering, applied physics, and thin films.

Top concepts

Publications per year

1969–1971

2

Publications

2

Characteristics of Fast Surface States Associated with SiO[sub 2]-Si and Si[sub 3]N[sub 4]-SiO[sub 2]-Si Structures

B. E. Deal, E. L. MacKenna, P. L. Castro · Journal of The Electrochemical Society · 1969 · 149 citations

, , +13

Thermal oxidation of polycrystalline silicon films

T. I. Kamins, E. L. MacKenna · Metallurgical Transactions · 1971 · 21 citations

, , +7

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