Concepedia

XPS depth-profile of the suboxide distribution at the native oxide/Ta interface

Manika Khanuja, Himani Sharma, B. R. Mehta, S. M. Shivaprasad

Journal of Electron Spectroscopy and Related Phenomena · 2008 · 100 citations · 22 references

DOI

Concepts

References

22

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

, , +10

Practical surface analysis

Vacuum · 1994 · 3.3K citations

Enhancement of the dielectric constant of Ta2O5through substitution with TiO2

R. F. Cava, W. F. Peck, J. J. Krajewski · Nature · 1995 · 212 citations

, , +14

XPS study of N2 annealing effect on thermal Ta2O5 layers on Si

E. Atanassova, G. Tyuliev, A. Paskaleva et al. · Applied Surface Science · 2003 · 120 citations

, , +14

Core-level shifts and oxidation states of Ta and W: Electron spectroscopy for chemical analysis applied to surfaces

F. J. Himpsel, J. F. Morar, F. R. McFeely et al. · Physical review. B, Condensed matter · 1984 · 107 citations

, , +17