Concepedia

E. Atanassova

EA

72

Publications

2.2K

Citations

26

H-Index

1974

Active since

Affiliations

Georgi Nadjakov Institute of Solid State Physics(Current)

Bulgarian Academy of Sciences

FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic

Institute of Mechanics

E. Atanassova is an author at Georgi Nadjakov Institute of Solid State Physics specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringMicroelectronicsMaterials EngineeringThin FilmsNanoelectronicsSurface SciencePhysics

Publications per year

1974–2017

72

Publications

72

AES and XPS study of thin RF-sputtered Ta2O5 layers

E. Atanassova, T. Dimitrova, J. Koprinarova · Applied Surface Science · 1995 · 197 citations

Materials Engineering, Materials Science, Engineering +5

X-ray photoelectron spectroscopy of thermal thin Ta2O5 films on Si

E. Atanassova, D. Spassov · Applied Surface Science · 1998 · 161 citations

Materials Science, Engineering, Oxide Electronics +6

XPS study of N2 annealing effect on thermal Ta2O5 layers on Si

E. Atanassova, G. Tyuliev, A. Paskaleva et al. · Applied Surface Science · 2003 · 118 citations

Materials Engineering, Materials Science, Engineering +7

Challenges of Ta2O5 as high-k dielectric for nanoscale DRAMs

E. Atanassova, A. Paskaleva · Microelectronics Reliability · 2006 · 103 citations

Materials Science, Nanoscale System, Engineering +7

Influence of γ radiation on thin Ta2O5–Si structures

E. Atanassova, A. Paskaleva, D. Spassov et al. · Microelectronics Journal · 2001 · 88 citations

Rows per page

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