Publication | Closed Access
XPS study of N2 annealing effect on thermal Ta2O5 layers on Si
118
Citations
32
References
2003
Year
Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsApplied PhysicsThermal Ta2o5 LayersSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorXps Study
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