AES and XPS study of thin RF-sputtered Ta2O5 layers

Practical surface analysis

Vacuum · 1994 · 3.3K citations

Practical surface analysis

E. Umbach · TrAC Trends in Analytical Chemistry · 1992 · 2.5K citations

An Auger analysis of the SiO2-Si interface

J. S. Johannessen, W. E. Spicer, Y. E. Strausser · Journal of Applied Physics · 1976 · 260 citations

Natural Sciences, Chemistry, Materials Science +16

The physics of SiO2 and its interfaces

W. Beall Fowler · Journal of Colloid and Interface Science · 1980 · 238 citations

Natural Sciences, Materials Science, Physics +10

UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs

H. Shinriki, Masami Nakata · IEEE Transactions on Electron Devices · 1991 · 205 citations

Natural Sciences, Materials Engineering, Materials Science +17