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Comparison of the electrical and optical properties of direct current and radio frequency sputtered amorphous indium gallium zinc oxide films

Materials ScienceElectrical EngineeringOptical MaterialsEngineeringRadio FrequencyOptical PropertiesOxide ElectronicsApplied PhysicsGallium OxideSemiconductor MaterialThin Film Process TechnologyThin FilmsOptoelectronicsThin Film Processing