Publication | Closed Access
Chemical deposition of Al2O3 thin films on Si substrates
87
Citations
18
References
2009
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsAl2o3 Thin FilmsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1