Publication | Closed Access
Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition
97
Citations
30
References
2007
Year
Materials ScienceEngineeringApplied PhysicsLaser DepositionLaser-assisted DepositionThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing
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