Concepedia

Publication | Closed Access

Investigation of oxide layer removal mechanism using reactive gases

DOI

15

Citations

13

References

2015

Year

Hyuntae Kim, Jung-Soo Lim, Minsu Kim, Hoon-Jung Oh, Dae-Hong Ko, Gyoo-Dong Kim, Woo-Gon Shin, Jin-Goo Park
Microelectronic Engineering

References

YearCitations

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