Concepedia

P. J. Matsuo

PJ

13

Publications

789

Citations

13

H-Index

1995

Active since

Affiliations

University at Albany, State University of New York(Current)

Albany State University

Air Products (United States)

IBM (United States)

P. J. Matsuo is an author at University at Albany, State University of New York specializing in engineering, surface science, and applied physics.

Top concepts

Publications per year

1995–2001

13

Publications

13

Chemical dry etching of silicon nitride and silicon dioxide using CF4/O2/N2 gas mixtures

B. E. E. Kastenmeier, P. J. Matsuo, JJ Beulens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 144 citations

, , +16

Highly selective etching of silicon nitride over silicon and silicon dioxide

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 104 citations

, , +16

Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 93 citations

, , +17

Patterning of fluorine-, hydrogen-, and carbon-containing SiO2-like low dielectric constant materials in high-density fluorocarbon plasmas: Comparison with SiO2

T. E. F. M. Standaert, P. J. Matsuo, Susan D. Allen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 75 citations

, , +18

Role of N2 addition on CF4/O2 remote plasma chemical dry etching of polycrystalline silicon

P. J. Matsuo, B. E. E. Kastenmeier, JJ Beulens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 68 citations

, , +16

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