P. J. Matsuo

Statistics

Publications

Citations

796

H-Index

Active since

1995

Affiliations

University at Albany, State University of New York(Current)

Albany State University

Air Products (United States)

IBM (United States)

P. J. Matsuo is an author at University at Albany, State University of New York specializing in materials science, surface science, and materials engineering.

Publications per year

1995–2001

Publications

Chemical dry etching of silicon nitride and silicon dioxide using CF4/O2/N2 gas mixtures

B. E. E. Kastenmeier, P. J. Matsuo, JJ Beulens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +15

Highly selective etching of silicon nitride over silicon and silicon dioxide

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 105 citations

Engineering, Materials Engineering, Materials Science +14

Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +15

Patterning of fluorine-, hydrogen-, and carbon-containing SiO2-like low dielectric constant materials in high-density fluorocarbon plasmas: Comparison with SiO2

T. E. F. M. Standaert, P. J. Matsuo, Susan D. Allen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 76 citations

Engineering, Materials Engineering, Materials Science +14

Role of N2 addition on CF4/O2 remote plasma chemical dry etching of polycrystalline silicon

P. J. Matsuo, B. E. E. Kastenmeier, JJ Beulens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +17

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