B. E. E. Kastenmeier

Statistics

Publications

Citations

661

H-Index

Active since

1995

Affiliations

University at Albany, State University of New York(Current)

Albany State University

IBM (United States)

Air Products (United States)

University of Maryland, College Park

B. E. E. Kastenmeier is an author at University at Albany, State University of New York specializing in materials science, materials engineering, and surface science.

Publications per year

1995–2005

Publications

Chemical dry etching of silicon nitride and silicon dioxide using CF4/O2/N2 gas mixtures

B. E. E. Kastenmeier, P. J. Matsuo, JJ Beulens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +15

Highly selective etching of silicon nitride over silicon and silicon dioxide

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 105 citations

Engineering, Materials Engineering, Materials Science +14

Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +15

Role of N2 addition on CF4/O2 remote plasma chemical dry etching of polycrystalline silicon

P. J. Matsuo, B. E. E. Kastenmeier, JJ Beulens et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface science issues in plasma etching

G. S. Oehrlein, M. F. Doemling, B. E. E. Kastenmeier et al. · IBM Journal of Research and Development · 1999 · 45 citations

Engineering, Electrical Engineering, Materials Science +16

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