Electromigration effects in aluminum alloy metallization

Electromigration failure modes in aluminum metallization for semiconductor devices

J. R. Black · Proceedings of the IEEE · 1969 · 675 citations

Engineering, Materials Engineering, Materials Science +16

Reduction of Electromigration in Aluminum Films by Copper Doping

I. Ames, F. M. d’Heurle, R. E. Horstmann · IBM Journal of Research and Development · 1970 · 301 citations

Natural Sciences, Materials Engineering, Materials Science +17

SLT Device Metallurgy and its Monolithic Extension

P. A. Totta, R.P. Sopher · IBM Journal of Research and Development · 1969 · 241 citations

Engineering, Materials Engineering, Materials Science +15

The effect of copper additions on electromigration in aluminum thin films

F. M. d’Heurle · Metallurgical Transactions · 1971 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +12

Inhibition of Electromigration Damage in Thin Films

R. Rosenberg · Journal of Vacuum Science and Technology · 1972 · 117 citations

Natural Sciences, Materials Engineering, Materials Science +14