Concepedia

Line edge roughness: experimental results related to a two-parameter model

Leonardus H. A. Leunissen

Microelectronic Engineering · 2004 · 28 citations · 2 references

DOI

Concepts

References

2

Quantification of line-edge roughness of photoresists. II. Scaling and fractal analysis and the best roughness descriptors

Vassilios Constantoudis, G. P. Patsis, Angeliki Tserepi · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 107 citations

, , +16

Resist line edge roughness and aerial image contrast

J. Shin, Geng Han, Yuling Ma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 89 citations

, , +17