Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 203 citations · 0 references
EngineeringMicroscopyAtomic ResolutionElectron MicroscopyMicroscopy MethodNanoelectronicsAtomic Force MicroscopeNanometrologyAfm ImagesMaterials SciencePhysicsNanotechnologyGraphite Afm ImagesAtomic PhysicsMicroanalysisMicrofabricationScanning Probe MicroscopySurface ScienceApplied PhysicsCondensed Matter PhysicsScanning Force MicroscopyElectron Microscope
The atomic force microscope (AFM) has achieved atomic resolution on nonconducting as well as electrically conducting surfaces, opening a new class of materials to atomically resolved surface imaging. Images of boron nitride (a nonconductor) reveal that AFM can distinguish different atomic species. AFM images of molybdenum disulfide and graphite are also presented. Graphite AFM images appear identical to images obtained by scanning tunneling microscopy (STM), although AFM and STM probably respond to different atomic sites on the graphite surface. Microfabrication procedures for constructing low-mass force-sensing cantilevers are discussed.