In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.5K citations

Materials Science, Surface Technology, Chemical Engineering +14

Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing

H. Kim · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 539 citations

Materials Science, Materials Engineering, Aluminium Nitride +14

Island growth as a growth mode in atomic layer deposition: A phenomenological model

Riikka L. Puurunen, Wilfried Vandervorst · Journal of Applied Physics · 2004 · 321 citations

Aluminium Nitride, Engineering, Crystal Growth Technology +16

Reaction Mechanism Studies on Atomic Layer Deposition of Ruthenium and Platinum

Titta Aaltonen, Antti Rahtu, Mikko Ritala et al. · Electrochemical and Solid-State Letters · 2003 · 234 citations

Engineering, Chemistry, Chemical Deposition +18

Peak shape analysis of core level photoelectron spectra using UNIFIT for WINDOWS

R. Hesse, Thomas Chassé, R. Szargan · Fresenius Journal of Analytical Chemistry · 1999 · 163 citations

Engineering, Physics, Electron Spectroscopy +9