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In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition

Materials ScienceEpitaxial GrowthEngineeringUltra-thin Ruthenium FilmsSurface ScienceApplied PhysicsIn-situ AnalysisThin FilmsMolecular Beam EpitaxyChemical DepositionInitial GrowthThin Film Processing