Field emission photocathode array for multibeam electron lithography

The semiconductor field-emission photocathode

D.K. Schroder, R.N. Thomas, J. Vine et al. · IEEE Transactions on Electron Devices · 1974 · 70 citations

Engineering, Electrical Engineering, Materials Science +13

Patterned negative electron affinity photocathodes for maskless electron beam lithography

Jens Schneider, Pradeep Sen, D. S. Pickard et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 25 citations

Engineering, Electrical Engineering, Materials Science +14

Recent progress on the electron image projector

Jason Scott · Journal of Vacuum Science and Technology · 1978 · 24 citations

Natural Sciences, Physics, Microelectronics +7

Energy distributions of field-emitted electrons from silicon: Evidence for surface states

B. Lewis, T.E. Fischer · Surface Science · 1974 · 23 citations

Natural Sciences, Materials Science, Physics +16

High throughput electron lithography with the multiple aperture pixel by pixel enhancement of resolution concept

P. Kruit · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 20 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15