Concepedia

B. J. Kampherbeek

BJ

Statistics

Publications

6

Citations

145

H-Index

6

Active since

2001

Affiliations

Mapper Lithography (Netherlands)(Current)

Delft University of Technology

B. J. Kampherbeek is an author at Mapper Lithography (Netherlands) specializing in engineering, microelectronics, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationNanolithographyOptoelectronicsComputer EngineeringMicroscopyTechnologyApplied PhysicsElectrical Engineering

Publications per year

2001–2011

6

Publications

6

MAPPER: high-throughput maskless lithography

Marco Wieland, G. de Boer, G. F. ten Berge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 59 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

MAPPER: high throughput maskless lithography

E. Slot, Marco Wieland, G. de Boer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 41 citations

Engineering, Electron-beam Lithography, Microscopy +18

Scanning exposures with a MAPPER multibeam system

C. van den Berg, G. de Boer, S. Boschker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +23

Field emission photocathode array for multibeam electron lithography

Marco Wieland, B. J. Kampherbeek, P. Addessi et al. · Microelectronic Engineering · 2001 · 11 citations

Photonics, Engineering, Electron-beam Lithography +4

MAGIC: a European program to push the insertion of maskless lithography

L. Pain, B. Icard, S. Tedesco et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations · Full text

European Program, Engineering, Electron-beam Lithography +19

1–5 of 6