G. de Boer

MAPPER: high-throughput maskless lithography

Marco Wieland, G. de Boer, G. F. ten Berge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 59 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

MAPPER: progress toward a high-volume manufacturing system

G. de Boer, Michel Dansberg, R. Jager et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 30 citations

Engineering, Electron-beam Lithography, Digital Manufacturing +19

Scanning exposures with a MAPPER multibeam system

C. van den Berg, G. de Boer, S. Boschker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +23

Mapper: High troughput maskless lithography

S. W. H. K. Steenbrink, J. J. M. Peijster, Marco Wieland et al. · 2008 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +18