Concepedia

S. W. H. K. Steenbrink

SW

9

Publications

254

Citations

9

H-Index

2004

Active since

Affiliations

Mapper Lithography (Netherlands)(Current)

Delft University of Technology

S. W. H. K. Steenbrink is an author at Mapper Lithography (Netherlands) specializing in engineering, electrical engineering, and microelectronics.

Top concepts

Publications per year

2004–2013

9

Publications

9

MAPPER: high-throughput maskless lithography

Marco Wieland, G. de Boer, G. F. ten Berge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 59 citations

, , +15

Local critical dimension variation from shot-noise related line edge roughness

P. Kruit, S. W. H. K. Steenbrink · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 51 citations

, , +15

MAPPER: high throughput maskless lithography

E. Slot, Marco Wieland, G. de Boer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 41 citations

, , +18

MAPPER: progress toward a high-volume manufacturing system

G. de Boer, Michel Dansberg, R. Jager et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 30 citations

, , +19

Optimum dose for shot noise limited CD uniformity in electron-beam lithography

P. Kruit, S. W. H. K. Steenbrink, R. Jager et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 25 citations

, , +16

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