Concepedia

G. F. ten Berge

GF

4

Publications

121

Citations

4

H-Index

2008

Active since

Affiliations

Mapper Lithography (Netherlands)(Current)

G. F. ten Berge is an author at Mapper Lithography (Netherlands) specializing in nanolithography, computer engineering, and engineering.

Top concepts

EngineeringNanolithographyOptoelectronicsMicroelectronicsMicrofabricationComputer EngineeringElectrical EngineeringTechnologyEducationMicroscopy

Publications per year

2008–2010

4

Publications

4

MAPPER: high-throughput maskless lithography

Marco Wieland, G. de Boer, G. F. ten Berge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 59 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

MAPPER: high throughput maskless lithography

E. Slot, Marco Wieland, G. de Boer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 41 citations

Engineering, Electron-beam Lithography, Microscopy +18

MAPPER: high-throughput maskless lithography

M. J. Wieland, G. de Boer, G. F. ten Berge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 11 citations

Electrical Engineering, Engineering, Electron-beam Lithography +14

Mapper: High troughput maskless lithography

S. W. H. K. Steenbrink, J. J. M. Peijster, Marco Wieland et al. · 2008 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +18

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