Concepedia

R. Jager

RJ

Statistics

Publications

5

Citations

136

H-Index

5

Active since

2004

Affiliations

Mapper Lithography (Netherlands)(Current)

R. Jager is an author at Mapper Lithography (Netherlands) specializing in engineering, microelectronics, and electrical engineering.

Top concepts

EngineeringOptoelectronicsMicroelectronicsElectrical EngineeringMicroscopyApplied PhysicsMicrofabricationPhysicsTechnologyInstrumentation

Publications per year

2004–2013

5

Publications

5

MAPPER: high-throughput maskless lithography

Marco Wieland, G. de Boer, G. F. ten Berge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 59 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

MAPPER: progress toward a high-volume manufacturing system

G. de Boer, Michel Dansberg, R. Jager et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 30 citations

Engineering, Electron-beam Lithography, Digital Manufacturing +19

Optimum dose for shot noise limited CD uniformity in electron-beam lithography

P. Kruit, S. W. H. K. Steenbrink, R. Jager et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 25 citations

Engineering, Electron-beam Lithography, Microscopy +16

Scanning exposures with a MAPPER multibeam system

C. van den Berg, G. de Boer, S. Boschker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +23

Mapper: High troughput maskless lithography

S. W. H. K. Steenbrink, J. J. M. Peijster, Marco Wieland et al. · 2008 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +18

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