Surface preparation of Si substrates for epitaxial growth

Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

Akitoshi Ishizaka, Y. Shiraki · Journal of The Electrochemical Society · 1986 · 1.6K citations

Engineering, Materials Engineering, Materials Science +17

Activation energy for surface diffusion of Si on Si(001): A scanning-tunneling-microscopy study

Y. W. Mo, Jonas Kleiner, M. B. Webb et al. · Physical Review Letters · 1991 · 728 citations

Natural Sciences, Materials Engineering, Materials Science +17

Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphology

Yves J. Chabal, G. S. Higashi, K. Raghavachari et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 664 citations

Natural Sciences, Chemistry, Materials Science +17

Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy

M. Grundner, H.‐E. Jacob · Applied Physics A · 1986 · 411 citations

Natural Sciences, Materials Engineering, Materials Science +17

Determination of the local electronic structure of atomic-sized defects on Si(001) by tunneling spectroscopy

Robert J. Hamers, Ulrich Köhler · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 392 citations

Natural Sciences, Materials Science, Physics +17