Materials science forum · 2008 · 25 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsMechanical Behavior Of MaterialsCrystal GrowthFracture MechanicsFracture ToughnessMicrostructure ControlSemiconductor Crystal GrowthStrain HardeningLow-temperature GrowthMechanical StabilitySilicon Carbide (Sic) MaterialsSilicon Carbide Crystal GrowthSilicon Crystal GrowthTensile StrainTensile StrengthThermomechanical Behavior Of Ceramics
The theromoelastic stress in post-growth SiC crystals has been investigated in order to suppress the cracks which were frequently observed in SiC crystals with larger diameters. Optimizing the temperature distribution in growing crystals lead to reduction of tensile stress components, and thus resulting in crack-free 100mm diameter SiC crystals with micropipe (MP) densities of 0.025/cm2. The concept of process optimization we established is confirmed to be effective to the growth of large diameter SiC crystals with mechanical stability.