Frequency response in pulsed DC reactive sputtering processes

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

Engineering, Materials Science, Physics +16

Modeling of reactive sputtering of compound materials

S. Berg, Hans‐Olof Blom, T. Larsson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 373 citations

Natural Sciences, Materials Engineering, Materials Science +13

Pulsed magnetron sputter technology

S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 338 citations

Natural Sciences, Materials Science, Physics +6

Handbook of thin film process technology

W Steckelmacher · Vacuum · 1996 · 285 citations

Natural Sciences, Chemical Engineering, Materials Science +12

Predicting thin-film stoichiometry in reactive sputtering

S. Berg, T. Larsson, C. Nender et al. · Journal of Applied Physics · 1988 · 173 citations

Natural Sciences, Materials Engineering, Materials Science +14