Concepedia

Computational analysis of GaN/InGaN deposition in MOCVD vertical rotating disk reactors

L. Kadinski, V. Merai, A. Parekh, J. Ramer, E. Armour, R. A. Stall, A. Gurary, A.O. Galyukov, Yu.N. Makarov

Journal of Crystal Growth · 2003 · 58 citations · 3 references

DOI

Concepts

References

3

The scaling of CVD rotating disk reactors to large sizes and comparison with theory

Alan Thompson, R. A. Stall, P. Zawadzki et al. · Journal of Electronic Materials · 1996 · 33 citations

, , +10

Advances in the modeling of MOVPE processes

S. Yu. Karpov · Journal of Crystal Growth · 2003 · 29 citations

, , +6

Modeling and experimental analysis of AlGaN MOVPE in commercial vertical high-speed rotating-disk reactors

K. Mazaev, A.V. Lobanova, E.V. Yakovlev et al. · Journal of Crystal Growth · 2003 · 12 citations

, , +6