Concepedia

Polycrystalline silicon thin films for MEMS applications

H. Mahfoz-Kotb, A.C. Salaün, Tayeb Mohammed‐Brahim, France Le Bihan, M. El-Marssi

Thin Solid Films · 2003 · 19 citations · 13 references

DOI

Concepts

References

13

The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors

I. H. Campbell, P. M. Fauchet · Solid State Communications · 1986 · 2.2K citations

, , +16

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

, , +12

Residual stress/strain analysis in thin films by X-ray diffraction

I. C. Noyan, Ting C. Huang, Brian York · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1995 · 247 citations

, , +17

Improved one-phonon confinement model for an accurate size determination of silicon nanocrystals

Vincent Paillard, Pascal Puech, M. A. Laguna et al. · Journal of Applied Physics · 1999 · 240 citations · Full text

, , +17

Self-Diffusion in Intrinsic and Extrinsic Silicon

J. M. Fairfield, B. J. Masters · Journal of Applied Physics · 1967 · 191 citations

, , +17