Static and Dynamic Analysis of Split-Gate RESURF Stepped Oxide (RSO) MOSFETs for 35 V Applications

C.F. Tong, Philip Mawby, James A. Covington, Frédéric Morancho

2009 · 24 citations · 5 references

Concepts

Abstract

In this work, the static and dynamic performance of three different proposed trench MOSFET architectures for a 35 V breakdown range have been analyzed by means of extensive TCAD simulations. The trench field-plate in the drift region in RSO MOSFET structures highly improves the R <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on-sp</inf> /V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">BR</inf> trade-off in comparison with the conventional UMOS counterpart. The Split-Gate RSO MOSFET is an alternative solution in order to reduce the gate-to-drain charge and capacitance, therefore further reduce the switching losses with respect to RSO MOSFET.

References

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