Publication | Closed Access

Multicycle rapid thermal annealing technique and its application for the electrical activation of Mg implanted in GaN

Materials ScienceWide-bandgap SemiconductorElectrical EngineeringEngineeringApplied PhysicsAluminum Gallium NitrideGan Power DeviceGallium OxideCategoryiii-v SemiconductorElectrical Activation