X-ray double crystal and X-ray topographic characterization of silicon carbide thin films on silicon, titanium carbide, 6H-silicon carbide, and aluminum nitride/sapphire substrates

J. Chaudhuri, R. Thokala, James H. Edgar, B. S. Sywe

Thin Solid Films · 1996 · 14 citations · 19 references

Concepts

References

19