Microelectronics Reliability · 2000 · 12 citations · 5 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsMetal-oxide-semiconductor Field-effect TransistorsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSilicon MaterialsFully Depleted Silicon-on-insulator TransistorsGate Oxide LeakageInput CharacteristicsInterface Trap StatesSilicon DioxideSilicon PassivationSilicon-on-insulator Technology
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