Single atom Si nanoelectronics using controlled single-ion implantation - Concepedia

Concepedia

Publication | Closed Access

Single atom Si nanoelectronics using controlled single-ion implantation

10

Citations

12

References

2005

Year

M. Mitić, S. E. Andresen, Chih Hwan Yang, T. Hopf, Victor Chan, E. Gauja, Fay E. Hudson, T. M. Buehler, R. Brenner, A. J. Ferguson,

Microelectronic Engineering

Ion ImplantationEngineeringNanotechnologyNanoelectronicsApplied PhysicsSilicon On InsulatorSingle-ion Implantation

References

	Year	Citations

Page 1