Assembly of micro-optical devices using magnetic actuation

Microfabricated hinges

Kristofer S. J. Pister, Michael W. Judy, Steve R. Burgett et al. · Sensors and Actuators A Physical · 1992 · 279 citations

Micromachining for optical and optoelectronic systems

Ming C. Wu · Proceedings of the IEEE · 1997 · 264 citations

Engineering, Mechanical Engineering, Microfabrication +16

Magnetically actuated, addressable microstructures

Jack W. Judy, R.S. Muller · Journal of Microelectromechanical Systems · 1997 · 260 citations

Engineering, Electrical Engineering, Materials Science +17

Magnetic microactuation of torsional polysilicon structures

Jack W. Judy, R.S. Muller · Sensors and Actuators A Physical · 1996 · 101 citations

Engineering, Materials Engineering, Materials Science +13

Electrodeposition of Magnetic Materials

I. W. Wolf · Journal of Applied Physics · 1962 · 98 citations

Natural Sciences, Materials Engineering, Materials Science +13