Effects of Si-cap layer thinning and Ge segregation on the characteristics of Si/SiGe/Si heterostructure pMOSFETs

Young-Joo Song, Lim Jungwook, Sang-Hoon Kim, Hyun-Chul Bae, Jin-Young Kang, Kyung-Wan Park, Kyu-Hwan Shim

Solid-State Electronics · 2002 · 24 citations · 9 references

Concepts

References

9