Development of a process modeling for residual stress assessment of multilayer thin film structure - Concepedia

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Development of a process modeling for residual stress assessment of multilayer thin film structure

27

Citations

17

References

2015

Year

H.J. Wang, Haoyu Deng, S. Chiang, Yonghui Su, Kuo‐Ning Chiang

Thin Solid Films

Materials ScienceEngineeringMechanical BehaviorResidual Stress AssessmentStressstrain AnalysisSolid MechanicsResidual StressThin FilmsMechanics Of MaterialsThin Film Processing

References

	Year	Citations

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