Fabrication and characterization of diamond micro-optics

New etching process for device fabrication using diamond

Doo-Sup Hwang, T. Saito, Naoji Fujimori · Diamond and Related Materials · 2004 · 70 citations

Engineering, Materials Engineering, Materials Science +11

Dry etching of SiC in inductively coupled Cl₂/Ar plasma

Liudi Jiang, Natalie O. V. Plank, M. A. Blauw et al. · Journal of Physics D Applied Physics · 2004 · 61 citations

Engineering, Materials Engineering, Materials Science +17

Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

Erdan Gu, H. W. Choi, C. Liu et al. · Applied Physics Letters · 2004 · 60 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

CVD-diamond optical lenses

Eckhard Woerner, C. Wild, W. Mueller-Sebert et al. · Diamond and Related Materials · 2001 · 56 citations

Fabrication of natural diamond microlenses by plasma etching

H. W. Choi, Erdan Gu, Chonghua Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +15