M. A. Blauw

Balancing the etching and passivation in time-multiplexed deep dry etching of silicon

M. A. Blauw, T. Zijlstra, E. van der Drift · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 138 citations

Engineering, Materials Engineering, Materials Science +17

Kinetics and crystal orientation dependence in high aspect ratio silicon dry etching

M. A. Blauw, T. Zijlstra, R. A. Bakker et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 70 citations

Natural Sciences, Materials Science, Physics +15

The etching of silicon carbide in inductively coupled SF₆/O₂plasma

Natalie O. V. Plank, M. A. Blauw, E. W. J. M. van der Drift et al. · Journal of Physics D Applied Physics · 2003 · 63 citations

Natural Sciences, Materials Science, Physics +14

Dry etching of SiC in inductively coupled Cl₂/Ar plasma

Liudi Jiang, Natalie O. V. Plank, M. A. Blauw et al. · Journal of Physics D Applied Physics · 2004 · 61 citations

Engineering, Materials Engineering, Materials Science +17

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

Gabriel Crăciun, M. A. Blauw, E. van der Drift et al. · Journal of Micromechanics and Microengineering · 2002 · 58 citations

Engineering, Materials Engineering, Materials Science +13