Concepedia

R. A. Bakker

RA

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Publications

1

Citations

68

H-Index

1

Active since

2000

Affiliations

Delft University of Technology(Current)

R. A. Bakker is an author at Delft University of Technology specializing in plasma theory, microfabrication, and applied physics.

Top concepts

Publications per year

2000–2000

1

Publications

1

Kinetics and crystal orientation dependence in high aspect ratio silicon dry etching

M. A. Blauw, T. Zijlstra, R. A. Bakker et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 68 citations

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