New etching process for device fabrication using diamond

Quantum photoyield of diamond(111)—A stable negative-affinity emitter

F. J. Himpsel, J. A. Knapp, J. A. Vanvechten et al. · Physical review. B, Condensed matter · 1979 · 1.1K citations

Natural Sciences, Materials Science, Physics +15

Vacuum microelectronics: what's new and exciting

Takao Utsumi · IEEE Transactions on Electron Devices · 1991 · 282 citations

Engineering, Electrical Engineering, Materials Science +10

Smooth and high-rate reactive ion etching of diamond

Yoshiki Nishibayashi, Koji Kobashi, Takashi Hirao et al. · Diamond and Related Materials · 2002 · 137 citations · Full text

Engineering, Materials Engineering, Materials Science +8

Reactive Ion Etching of Diamond in O₂ and CF₄ Plasma, and Fabrication of Porous Diamond for Field Emitter Cathodes

Hiromu Shiomi · Japanese Journal of Applied Physics · 1997 · 118 citations

Natural Sciences, Materials Engineering, Materials Science +14

Surface smoothing of diamond membranes by reactive ion etching process

C. Vivensang, Laurence Ferlazzo-Manin, M. F. Ravet et al. · Diamond and Related Materials · 1996 · 56 citations

Engineering, Materials Engineering, Materials Science +15