T. Saito

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Active since

1981

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

T. Saito is an author at National Institute of Advanced Industrial Science and Technology specializing in mask fabrication, microfabrication, and materials engineering.

Publications per year

1981–2004

Publications

New etching process for device fabrication using diamond

Doo-Sup Hwang, T. Saito, Naoji Fujimori · Diamond and Related Materials · 2004 · 70 citations

Engineering, Materials Engineering, Materials Science +11

A new directional solidification technique for polycrystalline solar grade silicon

T. Saito, Shuhei Ichikawa · Photovoltaic Specialists Conference · 1981 · 10 citations

Engineering, Materials Engineering, Materials Science +14

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