<title>Design and fabrication of MEMS-based micropropulsion devices at JPL</title>

Abstract

The development and fabrication of microfabricated propulsion components at the Jet Propulsion Laboratory is reviewed. These include a vaporizing liquid micro-thruster, which vaporizes propellant to produce thrust. Thrust performances of 32 (mu) N for an input power of 0.8 W were measured. Miniature solenoid and latch valves are being developed by Moog, Inc. in collaboration with JPL.