Concepedia

157-nm lithography with high numerical aperture lens for sub-70 nm node

Toshiro Itani, Wataru Wakamiya, Julian S. Cashmore, M. C. Gower

Microelectronic Engineering · 2003 · 14 citations · 2 references

DOI

Concepts

References

2

Lithography with 157 nm lasers

T. M. Bloomstein, Mark W. Horn, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 105 citations · Full text

, , +14

Fluoropolymer resists for 157-nm lithography

Minoru Toriumi, Naomi Shida, Hiroyuki Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 29 citations

, , +15