Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component

C. Marxer, M.-A. Gre ́tillat, N. F. de Rooij, R. Ba ̈ttig, O. Anthamatten, B. Valk, Peter Vogel

Sensors and Actuators A Physical · 1997 · 24 citations · 4 references

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