Sensors and Actuators A Physical · 1997 · 24 citations · 4 references
EngineeringElectrical EngineeringMaterials EngineeringActuatorsMechatronicsActuator ReliabilityDevice ReliabilityElectrostatic ActuationElectrostatic ActuatorsMems ReliabilitySemiconductor ReliabilityActuation MechanismsActuator Reliability EngineeringElectrostatic Mems ActuatorsFabrication Of Electrostatic ActuatorsMems Reliability TestingPolysiliconReliability In Electrostatic Actuators
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Fracture strain of LPCVD polysilicon
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Megahertz opto-mechanical modulator
C. Marxer, M.-A. Grétillat, V.P. Jaecklin et al. · Sensors and Actuators A Physical · 1996 · 17 citations · Full text