O. Anthamatten

Vertical mirrors fabricated by reactive ion etching for fiber optical switching applications

C. Marxer, M.-A. Grétillat, N. F. de Rooij et al. · 2002 · 41 citations

Engineering, Materials Engineering, Materials Science +17

Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component

C. Marxer, M.-A. Gre ́tillat, N. F. de Rooij et al. · Sensors and Actuators A Physical · 1997 · 24 citations · Full text

Engineering, Electrical Engineering, Materials Engineering +15

Reflective duplexer based on silicon micromechanics for fiber-optic communication

C. Marxer, M.-A. Grétillat, Ν. F. de Rooij et al. · Journal of Lightwave Technology · 1999 · 19 citations

Engineering, Electrical Engineering, Optics +16

Megahertz opto-mechanical modulator

C. Marxer, M.-A. Grétillat, V.P. Jaecklin et al. · Sensors and Actuators A Physical · 1996 · 17 citations · Full text

Micro-opto-mechanical 2x2 switch for single mode fibers based on plasma-etched silicon mirror and electrostatic actuation

C. Marxer, C. L. Thio, N. F. de Rooij et al. · Infoscience (Ecole Polytechnique Fédérale de Lausanne) · 1998 · 12 citations · Full text

Engineering, Materials Engineering, Materials Science +17