Solid State Communications · 1999 · 58 citations · 5 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor Device MaterialsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsNitride Thin FilmsNitrides DepositionNitrides Thin FilmsRadio Frequency SputteringSputter DepositionSputteringSputtering Techniques
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