Concepedia

S. M. Donovan

SM

Statistics

Publications

22

Citations

597

H-Index

14

Active since

1992

Affiliations

University of Florida(Current)

Sandia National Laboratories

Sandia National Laboratories California

Stevenson University

Alcatel Lucent (Germany)

S. M. Donovan is an author at University of Florida specializing in materials science, electronic materials, and materials engineering.

Publications per year

1992–2000

22

Publications

22

Growth and fabrication of GaN/AlGaN heterojunction bipolar transistor

Jung Han, Albert G. Baca, R. J. Shul et al. · Applied Physics Letters · 1999 · 87 citations · Full text

, , +17

Selective inductively coupled plasma etching of group-III nitrides in Cl2- and BCl3-based plasmas

R. J. Shul, C. G. Willison, M. M. Bridges et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 63 citations

, , +17

Surface Chemical Treatment for the Cleaning of AlN and GaN Surfaces

K. N. Lee, S. M. Donovan, M. E. Overberg et al. · Journal of The Electrochemical Society · 2000 · 61 citations

, , +17

High-density plasma etch selectivity for the III–V nitrides

R. J. Shul, C. G. Willison, M. M. Bridges et al. · Solid-State Electronics · 1998 · 42 citations

, , +13

Comparison of inductively coupled plasma Cl2 and Cl4/H2 etching of III-nitrides

Hyun Cho, C. B. Vartuli, S. M. Donovan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 33 citations

, , +17

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