C. B. Vartuli

Ion implantation doping and isolation of GaN

S. J. Pearton, C. B. Vartuli, J.C. Zolper et al. · Applied Physics Letters · 1995 · 298 citations

Semiconductors, Materials Science, Electrical Engineering +13

High temperature electron cyclotron resonance etching of GaN, InN, and AlN

R. J. Shul, S.P. Kilcoyne, Mary H. Crawford et al. · Applied Physics Letters · 1995 · 112 citations

Materials Science, Wide-bandgap Semiconductor, Electrical Engineering +13

Application of focused ion beam lift‐out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis

F. A. Stevie, C. B. Vartuli, Lucille A. Giannuzzi et al. · Surface and Interface Analysis · 2001 · 97 citations

Engineering, Microscopy, Sims Analysis +23

Wet chemical etching survey of III-nitrides

C. B. Vartuli, S. J. Pearton, C. R. Abernathy et al. · Solid-State Electronics · 1997 · 75 citations

Materials Science, Wet Chemical, Engineering +4

ICl/Ar electron cyclotron resonance plasma etching of III–V nitrides

C. B. Vartuli, S. J. Pearton, J. W. Lee et al. · Applied Physics Letters · 1996 · 60 citations

Materials Science, Electrical Engineering, Plasma Electronics +13