J. W. Lee

Minority-carrier-enhanced reactivation of hydrogen-passivated Mg in GaN

S. J. Pearton, J. W. Lee, C. R. YUAN · Applied Physics Letters · 1996 · 63 citations

Engineering, Materials Engineering, Materials Science +17

ICl/Ar electron cyclotron resonance plasma etching of III–V nitrides

C. B. Vartuli, S. J. Pearton, J. W. Lee et al. · Applied Physics Letters · 1996 · 60 citations

Engineering, Materials Engineering, Materials Science +15

Cl2/Ar and CH4/H2/Ar dry etching of III–V nitrides

C. B. Vartuli, J. D. MacKenzie, J. W. Lee et al. · Journal of Applied Physics · 1996 · 57 citations

Engineering, Materials Engineering, Materials Science +16

High microwave power electron cyclotron resonance etching of III–V semiconductors in CH4/H2/Ar

S. J. Pearton, J. W. Lee, E. S. Lambers et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 21 citations

Engineering, Materials Engineering, Materials Science +15

Damage introduction in InGaP by electron cyclotron resonance Ar plasmas

J. W. Lee, S. J. Pearton, C. R. Abernathy et al. · Applied Physics Letters · 1995 · 16 citations

Engineering, Materials Engineering, Materials Science +16